JPH0215724U - - Google Patents
Info
- Publication number
- JPH0215724U JPH0215724U JP9324688U JP9324688U JPH0215724U JP H0215724 U JPH0215724 U JP H0215724U JP 9324688 U JP9324688 U JP 9324688U JP 9324688 U JP9324688 U JP 9324688U JP H0215724 U JPH0215724 U JP H0215724U
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- transport rollers
- substrate
- swing
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9324688U JPH0627951Y2 (ja) | 1988-07-13 | 1988-07-13 | インライン式成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9324688U JPH0627951Y2 (ja) | 1988-07-13 | 1988-07-13 | インライン式成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0215724U true JPH0215724U (en]) | 1990-01-31 |
| JPH0627951Y2 JPH0627951Y2 (ja) | 1994-07-27 |
Family
ID=31317693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9324688U Expired - Lifetime JPH0627951Y2 (ja) | 1988-07-13 | 1988-07-13 | インライン式成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0627951Y2 (en]) |
-
1988
- 1988-07-13 JP JP9324688U patent/JPH0627951Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0627951Y2 (ja) | 1994-07-27 |